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Degree of Freedom Error in Capacitive Pressure sensor design

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Hello everyone, I have just started my PhD and I have no enough background regarding comsol. I am working on Capacitive Pressure sensor. Design is very simple there are two conductors of copper and there is a dielectric layer of PDMS between these two conductor plates. I am apply pressure on the top boundary and expecting there will be some deformation in top conductor plate because of pressure. I am trying to findout how the capacitance changing with applied pressure. I have also attached the design image here. I am getting this error when i try to compute the study of my design

Undefined value found. - Detail: Undefined value found in the equation residual vector. There are 52015 degrees of freedom giving NaN/Inf in the vector for the variable comp1.spatial.u. at coordinates: (0,0,0.00014), (1.27451e-05,0,0.00014), (2.54902e-05,0,0.00014), (0,0,0.00015), (0,0,0.00016), ... There are 52015 degrees of freedom giving NaN/Inf in the vector for the variable comp1.spatial.v. at coordinates: (0,0,0.00014), (1.27451e-05,0,0.00014), (2.54902e-05,0,0.00014), (0,0,0.00015), (0,0,0.00016), ... There are 52015 degrees of freedom giving NaN/Inf in the vector for the variable comp1.spatial.w. at coordinates: (0,0,0.00014), (1.27451e-05,0,0.00014), (2.54902e-05,0,0.00014), (0,0,0.00015), (0,0,0.00016), ...


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